Crystal pulling apparatus

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Including specific material of construction

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Details

156607, 1566171, 1566191, 156DIG83, 1566181, C30B 1530

Patent

active

048942065

ABSTRACT:
The present invention discloses a crystal pulling apparatus having a double-crucible structure, wherein an inner crucible is located in an outer crucible. An end of a pipe-like passage is located in a through hole formed in a side wall of an inner crucible located in an outer crucible, and a melt is supplied from the outer crucible to the inner crucible through the pipe-like passage, during crystal pulling. During melting or neckdown, prior to crystal pulling, diffusion of an impurity between the melts in the outer crucible and the inner crucible, and exchange of the melts between the outer crucible and the inner crucible are prevented by the pipe-like passage.

REFERENCES:
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Goorissen, "Segregation and Distribution of Impurities in the Preparation of Germanium and Silicon", Philips Technical Review, vol. 21, no. 7, pp. 185-220, Jun. 7, 1960.
Brice, Crystal Growth Processes, Blackie & Sons, Glasgow and London, 1956, pp. 114 to 119, and 148-149.
Matare, "General Considerations Concerning the Double-Crucible Method to Grow Uniformly Doped Germanium Crystals of High Perfection", Solid-State Electronics, vol. 6, pp. 163-167, 1963.
Japanese Patent Disclosure (Kokai) No. 60-18634 Suzuki, May, 11, 1985.
Leverton, "Floating Crucible Technique for Growing Uniformly Doped Crystals", Journal of Applied Physics, vol. 29, no. 8, pp. 1241-1244, Aug. 1958.

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