Crystal holding apparatus

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state

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Details

117900, 117911, C30B 3500

Patent

active

059102160

ABSTRACT:
In a crystal holding apparatus, a corrugated portion between a seed crystal and a straight cylindrical portion of a crystal is held by a lifting jig during a single-crystal growing process wherein the seed crystal is brought into contact with a material melt and is subsequently pulled while being rotated. The tip end portion of the lifting jig includes a swinging portion having a short stroke which swings to hold or release the corrugated portion. A lock mechanism is also provided in order to swing the swinging portion for opening/closing operation and to lock the swinging portion. Accordingly, it is possible to reliably hold the corrugated portion of a crystal while the crystal is pulled in accordance with the CZ method, for example.

REFERENCES:
patent: 4190630 (1980-02-01), Apilat et al.
patent: 5106593 (1992-04-01), Mizuishi et al.
patent: 5126113 (1992-06-01), Yamagishi et al.
patent: 5582642 (1996-12-01), Korb et al.

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