Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus – For crystallization from liquid or supercritical state
Patent
1998-03-16
2000-04-25
Hiteshew, Felisa
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
For crystallization from liquid or supercritical state
C30B 3500
Patent
active
060539755
ABSTRACT:
In a crystal holding apparatus, a corrugated portion between a seed crystal and a straight cylindrical portion of a monocrystal is held by holding portions of a lifting jig during a monocrystal growth process in which the seed crystal is brought into contact with material melt and is subsequently pulled while being rotated. In the crystal holding apparatus, an attachment member for establishing surface contact with the corrugated portion of the crystal is attached to the tip end of each holding portion of the lifting jig. Therefore, the monocrystal can be held reliably, so that the breaking and falling down of the monocrystal during the pulling operation can be prevented.
REFERENCES:
patent: 4190630 (1980-02-01), Apilat et al.
patent: 5126113 (1992-06-01), Yamagishi et al.
patent: 5196086 (1993-03-01), Kida et al.
patent: 5843229 (1998-12-01), Kimura et al.
patent: 5879449 (1999-03-01), Urang et al.
patent: 5882397 (1999-03-01), Iino et al.
Iida Makoto
Iino Eiichi
Kimura Masanori
Muraoka Shozo
Hiteshew Felisa
Shin-Etsu Handotai & Co., Ltd.
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