Crystal growth observing apparatus using a scanning tunneling mi

Details Crystal growth observing apparatus using a scanning tunneling mi Crystal growth observing apparatus using a scanning tunneling mi

1998-12-08

2000-06-13

Beck, Shrive

Coating apparatus

With indicating, testing, inspecting, or measuring means

With means for visual observation

118712, 117 85, 117201, B05C 1100

Patent

active

060744855

ABSTRACT:
A STM drive mechanism capable of moving a scanning tunneling microscope (STM) incorporated with a molecular beam epitaxy (MBE) device in the MBE device under vacuum and a substrate holder with a wide clearance formed between a substrate heating system and the substrate holder are provided. The STM is protected by a heat insulating shield from high vapor pressure atmosphere and radiant heat according to substrate heating.

REFERENCES:
patent: 4732108 (1988-03-01), Erickson
patent: 5323003 (1994-06-01), Shido et al.
patent: 5582646 (1996-12-01), Woollam et al.

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