Crystal growth furnace recharge

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Including specific material of construction

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C30B 1512

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active

044540965

ABSTRACT:
Several embodiments of a replenishment arrangement for furnishing molten semiconductor material to furnaces for growing monocrystalline boules are described. A replenishment crucible within which a melt of the material from which the boules are to be grown is communicated either intermittently or continuously with a plurality of growth furnaces.

REFERENCES:
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patent: 3002821 (1961-10-01), Haron
patent: 3206286 (1965-09-01), Bennett, Jr. et al.
patent: 3507625 (1970-04-01), Deyris
patent: 4036595 (1977-07-01), Lorenzini et al.
patent: 4282184 (1981-08-01), Fiegl et al.

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