Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate
2007-02-20
2007-02-20
Hiteshew, Felisa (Department: 1722)
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus
C117S030000, C117S032000, C117S900000
Reexamination Certificate
active
10921560
ABSTRACT:
The invention presented here relates to a crystal growing equipment. It is equipped in general with a resistance heater for heating a melt (13) as well as with field coils, which generate alternating magnetic field in a crucible, with which flows can be induced in the melt (13).The invention is so designed that the resistance heaters are also devised to function as the field coils, that is, they are built of a hollow cylindrical body (1), in which, by means of a surrounding slit (2) which winds around it, a spiral-shaped single layer current path is formed. This has the advantage that the current needed for the electrical heating in the equipment is also used for the generation of the magnetic field. Thus, neither separate field coils nor a separate current supply is necessary. Further, the resistance heater, which serves as the field coil arranged as a coil array, is high temperature resistant and surrounds the immediate hot core zone of the equipment and thus the region of the melt. Thus the volume, in which the magnetic field must be generated, is minimized. Further, the alternating magnetic field does not need to penetrate through the wall of the vessel of the crystal growing equipment, hence the vessel can be designed as a steel boiler in conventional manner.
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Altekrüger Burkhard
Mühe Andreas
Vonhoff Axel
Crystal Growing Systems GmbH
Hiteshew Felisa
Needle & Rosenberg P.C.
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