Crystal-etched matching faces on semiconductor chip and supporti

Details Crystal-etched matching faces on semiconductor chip and supporti Crystal-etched matching faces on semiconductor chip and supporti

1991-01-22

1992-10-06

Larkins, William D.

357 55, 357 60, 357 75, H01L 2704

Patent

active

051537001

ABSTRACT:
Semiconductor chips are mounted in a supporting semiconductor substrate, with matching anisotropic (crystal plane) faces on the chips and substrate. The chips may extend above the substrate to facilitate connection together.

REFERENCES:
patent: 3871015 (1975-03-01), Lin et al.
patent: 4190855 (1980-02-01), Inoue
patent: 4670770 (1987-06-01), Tai
IEEE Journal of Solid State Circuits, vol. SC 21, No. 5, Oct. 1986, pp. 845-851.

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