Crystal diameter measuring device

Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Including specific material of construction

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422106, 156601, 1566171, 1566181, C30B 1520

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active

052406849

ABSTRACT:
A device for measuring the diameter of the growing portions of the single crystals grown by the Czochralski technique is provided. This device is capable of measuring the crystal diameter with a high degree of accuracy over a wide range from the small-diameter portion thereof to the large diameter portion. A one-dimensional camera 28 and a two-dimensional camera 48 are fixed to a shoulder chamber 34 in such a manner that the optical axes thereof are parallel to each other. An optical path switch-over device, consisting of a cylinder 56, a movable plane mirror 52 mounted on a cylinder rod, and a fixed plane mirror 54, is provided. When the diameter of a neck portion of the single crystal 20 having a diameter of 10 mm or less is measured, the light reflected by the plane mirrors 52 and 54 is made incident on the two-dimensional camera 48, and the diameter of a bright ring 27 is measured on the basis of the image obtained by the two-dimensional camera. To measure the diameter of the conical and cylindrical portions 24 and 26 having a diameter of 10 mm or more, an image of a line lying across the bright ring 27 is obtained by the one-dimensional camera 28 by retracting the plane mirror 52, and the diameter of the bright ring 27 is measured.

REFERENCES:
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patent: 4926357 (1990-05-01), Katsuoka et al.
patent: 5020907 (1991-06-01), Ibe
P. J. Roksnoer et al, "Growth of Dislocation-Free Gallium-Phosphide Crystals from a Stoichiometric Melt.," Journal of Crystal Growth, vol. 40, No. 1, pp. 6-12, Sep. 1977.
Patent Abstracts of Japan, vol. 7, No. 248 (C-193), Nov. 4, 1983, JP-A-58 135 197, Aug. 11, 1983.
Patent Abstracts of Japan, vol. 11, No. 132 (C-417), Apr. 24, 1987, JP-A-61 266 391, Nov. 26, 1986.
Patent Abstract of Japan, vol. 12, No. 446 (C-546) Nov. 24, 1988, JP-A-63 170 296, Jul. 14, 1988.

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