Crystal diameter measuring device

Details Crystal diameter measuring device Crystal diameter measuring device

1993-11-29

1995-01-03

Nelms, David C.

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

With means for measuring, testing, or sensing

250560, G01N 2186

Patent

active

053789008

ABSTRACT:
The growing portion of a single crystal 1 grown by the pull method is recorded and the image signal is output to a digitizing circuit 3 that converts the image signal into binary data. A memory device 4 stores the digitized images and the point P at the boundary between dark and light is detected by scanning the stored digitized images starting from the scanning-start pixel and proceeding in the direction parallel to the direction of single crystal pulling. The diameter D of the growing portion of the single crystal is determined based upon the boundary P, and the scanning-start pixel for the current operation is set at the pixel that is separated from the boundary Pb in the preceding operation by a preset number of pixels d in the opposite direction of the scan.

REFERENCES:
patent: 4794263 (1988-12-01), Katsuoka et al.
patent: 5138179 (1992-08-01), Baba et al.
patent: 5170061 (1992-12-01), Baba

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