Crystal base plate and pressing device

Details Crystal base plate and pressing device Crystal base plate and pressing device

2003-09-18

2008-08-19

Kunemund, Robert (Department: 1792)

Plastic article or earthenware shaping or treating: apparatus

Means to create a vacuum or apply fluid pressure within a...

C425S384000, C425S394000, C100S25800A, C359S328000, C359S332000, C385S003000, C385S122000, C385S129000, C117S930000, C117S943000

Reexamination Certificate

active

07413430

ABSTRACT:
The upper block12contacts the bearing block20, and the bearing block20is coupled to the upper plate21. The upper block12has a protruding part22on the upper surface that is worked into a convex surface with a radius of R1, and the bearing block20has a recessed part23in the undersurface that is worked into a concave surface with a radius of R2(R2>R1). As a result of such a construction being used, the pressing surface of the upper pressing plate15always conforms to the surface of the quartz crystal substrate11during pressing, so that a uniform load is applied to the quartz crystal substrate11. As a result, the surface of the quartz crystal can be uniformly pressed in the hot pressing method.

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Nao Kurimura et al, “Suichoku Ouryoku Inka ni yoru Suisho no Twin Seigyo”, Dai 61 Kai Extended abstracts; the Japan Society of Applied Physics, No. 3, p. 1016, 3a-Q-1 (Sep. 3, 2000).

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