Cryopump synchronous motor load monitor

Communications: electrical – Condition responsive indicating system – Specific condition

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Details

73862193, 318432, 417572, 361 23, G08B 2100

Patent

active

059008229

ABSTRACT:
An apparatus and method for monitoring the torque load condition of a cryopump motor includes a power transducer for monitoring the electrical power input to the cryopump motor. A preferred embodiment of the power transducer includes a Hall-effect multiplier which measures the instantaneous and average electrical power input to the cryopump motor to determine torque load. Another preferred embodiment includes a power transducer which measures the Power Factor of the electrical power input to the cryopump motor to determine torque load. The Power Factor transducer includes a phase detector which detects the phase difference between the input voltage and the input current applied to the cryopump motor.

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