Cryopump synchronous motor load monitor

Details Cryopump synchronous motor load monitor Cryopump synchronous motor load monitor

1994-01-18

1997-07-29

Chin, Wellington

Pumps

Miscellaneous

318432, 62 555, B01D 800

Patent

active

056516673

ABSTRACT:
An apparatus and method for monitoring the torque load condition of a cryopump motor includes a power transducer for monitoring the electrical power input to the cryopump motor. A preferred embodiment of the power transducer includes a Hall-effect multiplier which measures the instantaneous and average electrical power input to the cryopump motor to determine torque load. Another preferred embodiment includes a power transducer which measures the Power Factor of the electrical power input to the cryopump motor to determine torque load. The Power Factor transducer includes a phase detector which detects the phase difference between the input voltage and the input current applied to the cryopump motor.

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