Cryopump regeneration method and apparatus

Details Cryopump regeneration method and apparatus Cryopump regeneration method and apparatus

1987-01-07

1988-01-12

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62100, 62116, 62268, 62500, 417901, B01D 800

Patent

active

047182407

ABSTRACT:
A cryopump is regenerated by means of an ejector pump which draws gas from the cryopump as the pump is warmed. The ejector is actuated by an inert gas. The same inert gas may also be used to purge the pump during evacuation.

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patent: 4438632 (1984-03-01), Lessard et al.
patent: 4446702 (1984-05-01), Peterson et al.
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patent: 4577465 (1986-03-01), Olsen et al.
Solid State Technology, vol. 25, No. 1, Jan. 1982, (Port Washington, US), J. F. Peterson et al.: "Vacuum Pump Technology; a Short Course on Theory and Operations", pp. 104-110, see p. 107, Right-Hand Column, Paragraph Regeneration--p. 108, Right-Hand Column, Paragraph 1.

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