Cryopump method and apparatus

Details Cryopump method and apparatus Cryopump method and apparatus

1992-12-10

1994-04-26

Bennet, Henry A.

Refrigeration

Low pressure cold trap process and apparatus

62383, B01D 800

Patent

active

053056124

ABSTRACT:
Cryopump apparatus and method for controlling the operating temperature of a cryoarray in a cryopump. The cryopump has means for thermally isolating one of more of the cryoarrays from the refrigeration source. The means for thermally isolating is a thermal switch formed from at least first and second switch elements made of materials having dissimilar coefficients of thermal expansion. The thermal switch is also used in isolating one of the pump's cryoarrays during a partial regeneration process. The thermal switch of the preferred embodiment may also be used to prevent one of the pump's cryoarrays from falling below a predetermined operating temperature.

REFERENCES:
patent: 3721101 (1973-03-01), Sheppard et al.
patent: 4356701 (1982-11-01), Bartlett et al.
patent: 4438632 (1984-03-01), Lessard et al.
patent: 4763483 (1988-05-01), Olsen
patent: 4953359 (1990-09-01), Forth et al.
patent: 5111667 (1992-05-01), Hafner

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