Cryopump device

Details Cryopump device Cryopump device

1979-05-22

1980-12-23

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

62268, 55269, 417901, B01D 800

Patent

active

042402620

ABSTRACT:
A cryopump device comprising a refrigerator section which has at least two expansion chamber cooling elements disposed in a space to be evacuated, a shielding wall disposed in the space encircling both expansion chamber cooling elements and formed by a thermally conductive material, the shielding wall being in heat transfer contact with one of the expansion chamber cooling elements, a condensation panel disposed inside the shielding wall and being in heat transfer contact with the other of the expansion chamber cooling elements, the shielding wall having an opening proximate the condensation panel so that the space is cooled by the other expansion chamber cooling element through the condensation panel.

REFERENCES:
patent: 3282058 (1966-11-01), Venema et al.
patent: 3338063 (1967-08-01), Hogan et al.
patent: 3423947 (1969-01-01), Moriya
patent: 3485054 (1969-12-01), Hogan
patent: 3721101 (1973-03-01), Sheppard
patent: 4121430 (1978-10-01), Bachler et al.

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