Cryopump apparatus

Refrigeration – Low pressure cold trap process and apparatus

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Details

55269, 62100, 62268, 417901, B01D 800

Patent

active

043410790

ABSTRACT:
Cryopump apparatus for evacuating very large chambers to ultra high vacuums includes cryogenic panels alternating with radiation shields having a unique Z-configuration which optically blind the panels. The panels and shields are supported by and housed within structure having specific components slidable along one another to thereby permit necessary movement of the components when the apparatus is subjected to cool-down or warm-up. The apparatus is characterized by very high pumping speeds and is capable of cryopumping from both sides thereof.

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