Refrigeration – Low pressure cold trap process and apparatus
Patent
1980-10-30
1982-07-27
Capossela, Ronald C.
Refrigeration
Low pressure cold trap process and apparatus
55269, 62100, 62268, 417901, B01D 800
Patent
active
043410790
ABSTRACT:
Cryopump apparatus for evacuating very large chambers to ultra high vacuums includes cryogenic panels alternating with radiation shields having a unique Z-configuration which optically blind the panels. The panels and shields are supported by and housed within structure having specific components slidable along one another to thereby permit necessary movement of the components when the apparatus is subjected to cool-down or warm-up. The apparatus is characterized by very high pumping speeds and is capable of cryopumping from both sides thereof.
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Capossela Ronald C.
CVI Incorporated
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