Cryopump and method of operating same

Details Cryopump and method of operating same Cryopump and method of operating same

1985-03-28

1987-05-26

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62227, 622284, 62268, 417901, B01D 800

Patent

active

046674772

ABSTRACT:
A cryopump and a method of operating the same, with the cryopump being provided with a cryopanel adapted to be cooled with cold heat generated by a cold heat generating device, and remove the ambient gas, and a device for regulating the temperature of said cryopanel in accordance with the ambient conditions. The cryopump is capable of varying its pumping speed by regulating in accordance with the ambient conditions the temperature of the cryopanel which is adapted to be cooled with cold heat and remove the ambient gas.

REFERENCES:
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patent: 3407615 (1968-10-01), Klipping
patent: 3585807 (1971-06-01), Hengevoss et al.
patent: 3667246 (1972-06-01), St. Lorant et al.
patent: 3803863 (1974-04-01), Jednagz et al.
patent: 3803865 (1974-04-01), Newton
patent: 4285710 (1981-08-01), Welch
patent: 4397155 (1983-08-01), Davey
patent: 4417448 (1983-11-01), Horn et al.
patent: 4454722 (1984-06-01), Bartlett et al.

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