Cryopump

Details Cryopump Cryopump

1994-01-18

1995-09-19

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

417901, 502402, 502527, B01D 800

Patent

active

054507294

ABSTRACT:
A cryopump array is described. Each vane of the array is coated with a 3-dimensional adsorbing structure made up of an adhesive which is transparent to passage of gases to be pumped by adsorption and a plurality of pieces of an appropriate adsorbing material adhered on top of one another.

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