Cryopump

Details Cryopump Cryopump

1982-12-06

1984-10-30

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62268, 417901, B01D 800

Patent

active

044793600

ABSTRACT:
A cryopump having two refrigerator stages operable for producing progressively lower temperatures and at least one surface between the refrigerator stages and in such thermal communication therewith as to have, during operation of the refrigerator stages, temperatures which adsorb and desorb thereon at least one gas in the cryopump, having the improvement comprising:

REFERENCES:
patent: 4240262 (1980-12-01), Nakamura et al.
patent: 4295338 (1981-10-01), Welch
patent: 4311018 (1982-01-01), Welch
patent: 4336690 (1982-06-01), Welch

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