Cryopump

Details Cryopump Cryopump

1979-02-13

1980-06-17

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 417901, F17C 702

Patent

active

042077460

ABSTRACT:
A cryopump having a cryopanel adapted for being cooled by a first refrigerant and shielded from radiation incident thereon by shields adapted for being cooled with a second refrigerant is disclosed. The cryopanel and the radiation shield are fabricated with a first material having high thermal conductivity, such as aluminum, while means for distributing refrigerant from refrigerant dewars to the cryopanel and shields are made of a second material, such as stainless steel. The stainless steel and aluminum sections are connected by an aluminum-steel transition connector adapted for providing vacuum tight connections at cryogenic temperatures. Both the cryopanel and chevrons comprising the shields are fabricated and extruded aluminum with coolant passages formed therein. Thermal distortions during operation are compensated by the use of stainless steel bellows within refrigerant distribution lines. Additionally the refrigerant distribution lines are utilized to suspend the cryopanel and shields within an evacuated environment of the cryopump.

REFERENCES:
patent: 3131396 (1964-04-01), Santeler et al.
patent: 3137551 (1964-10-01), Mark
patent: 3175373 (1965-03-01), Holkeboer et al.
patent: 3252652 (1966-05-01), Trendelenburg et al.
patent: 3256706 (1966-06-01), Hansen
patent: 3338063 (1967-08-01), Hogan et al.
patent: 3364654 (1968-01-01), Westbrook
patent: 3433297 (1969-03-01), Kohler

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