Cryopump

Details Cryopump Cryopump

1992-03-27

1993-08-03

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62295, 417901, B01D 800

Patent

active

052318400

ABSTRACT:
To perform an even, high temperature baking treatment at about 450.degree. C. to a cryopump for the achievement of an extremely high vacuum, the cryopump is divided into two, a pump section P and a refrigerator R; the pump section P is cut off, with a vacuum state maintained, from the refrigerator R; and cooling stages 49 and 69 of the refrigerator R are connected through detachable heat transfer means 53 and 73 to cryopanel 2 and 5 of the pump section P, whereby the pump section P and the refrigerator R being detachably connected together. A drive unit of the refrigerator R and a casing 1 of the pump section P are connected together by a bellows 36, and at least a part of the transfer means 53, which connects the cooling stage 49 and 69 of the refrigerator R to the cryopanels 2 and 5 of the pump section P, made of a flexible material.

REFERENCES:
patent: 4763483 (1988-08-01), Olsen
"Capability of Obtaining Extreme High Vacuum by Commercial G-M refrigerator-Cooled Cryopump", T. Kikuchi et al., vol. 3, 1990, pp. 160-162.
"Production of Extreme High Vacuum using a New-Bakeable Type Cryopump with G-M Refrigerators", Y. Matsui et al., vol. 1, 1991, pp. 37-40.
"The Ultimate Pressure of a Standard Cryopump Specified for Ultra-High Vacuum", S. Furuya et al., vol. 1, 1991, pp. 41-44.

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