Cryopump

Details Cryopump Cryopump

1982-09-29

1984-08-21

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62268, 417901, B01D 800

Patent

active

044662521

ABSTRACT:
The inner cryopanel of a cryopump includes a substrate having a plurality of holes such that the open areas represent 30% to 70% of the surface area of the substrate. A layer of cryosorbing material is secured to one surface of the substrate. An imperforate panel is juxtaposed to said one surface of said substrate.

REFERENCES:
patent: 3390536 (1968-07-01), Kreisman
patent: 3490247 (1970-01-01), Wing
patent: 4325220 (1982-04-01), McFarlin
Basics of Cryopumping, p. 4.

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