Refrigeration – Low pressure cold trap process and apparatus
Patent
1990-01-17
1992-01-28
Capossela, Ronald C.
Refrigeration
Low pressure cold trap process and apparatus
55269, 417901, B01D 800
Patent
active
050834452
ABSTRACT:
A cryopump for effecting a cooling operation by a freezing medium such as liquid helium. A plurality of radiation-heat shield plates for protecting cryopanels against an external heat radiation are provided in opposed relation to a gas inlet of the cryopump. Particularly, a plurality of groups of such radiation-heat shield plates are provided in such a manner that the radiation-heat shield plates of each group are arranged in a multi-stage manner in registry with one another in the direction of the depth of the cryopump and are disposed in parallel relation to one another. Each of the cryopanels is disposed adjacent to a rear surface of respective radiation-heat shield plates facing away from the gas inlet. With this construction, the gas molecules reflected by those radiation-heat shield plates and by a rear wall of the cryopump, are less liable to reach the gas inlet, and tend to be condensed at an increased rate on those cryopanels.
REFERENCES:
patent: 4214853 (1980-07-01), Mahl
patent: 4341079 (1982-07-01), Bonn
patent: 4406130 (1983-09-01), Hemmerich
B. D. Power: "High Vacuum Pumping Equipment", 1966, pp. 229-249, Chapman and Hall Ltd., London, GB, p. 246, paragraphs 2-3, FIGS. 7.14a, 7.14b.
Patent Abstracts of Japan, vol. 9, No. 326 (M-441( [2049], 21st Dec. 1985; & JP-A-60 159 383 (Yasushi Iwasa) 20-08-1985.
Patent Abstracts of Japan, vol. 9, No. 220 (E-341) [1943], 6th Sep. 1985; & JP-A-60 79 183 (Yoshinao Sanada) 04-05-1985.
Nemoto Takeo
Ogata Hisanao
Ono Yoichi
Saho Norihide
Uede Taisei
Capossela Ronald C.
Hitachi , Ltd.
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