Cryopump

Details Cryopump Cryopump

1982-10-29

1984-06-19

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 16510421, 417901, B01D 800

Patent

active

044547226

ABSTRACT:
For a given temperature differential between a refrigerated heat sink (28) and frontal cryopanel array (46), the mass of the entire cryopump array is minimized by providing thermal struts (54) between the heat sink and the frontal array. The thermal struts extend through, but are isolated from, the primary pumping surface to minimize their lengths. The struts support the frontal array independent of the side radiation shield to facilitate fabrication. To further reduce the temperature differential to the frontal array, heat pipes may be provided. Parallel heat pipes or solid thermal struts may provide the thermal path during cooldown of the system. By reducing the temperature differential between the frontal cryopanel array (46) and refrigerated heat sink (28) through the use of solid thermal struts or heat pipes the load carrying capability of a cryopump can be improved.

REFERENCES:
patent: 2703673 (1955-03-01), Winkler
patent: 3081068 (1963-03-01), Milleron
patent: 3218815 (1965-11-01), Chellis et al.
patent: 3433297 (1969-03-01), Kohler
patent: 3850001 (1974-11-01), Locke
patent: 4212170 (1980-07-01), Winkler
patent: 4266959 (1981-05-01), Welch
patent: 4277951 (1981-07-01), Longsworth

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