Cryogenic vacuum pump with expander speed control

Details Cryogenic vacuum pump with expander speed control Cryogenic vacuum pump with expander speed control

1993-09-02

1995-02-07

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

417901, B01D 800

Patent

active

053867084

ABSTRACT:
Apparatus and method for vacuum pumping an enclosed chamber includes a cryogenic pumping device in fluid communication with the chamber for removing gases from the chamber. The cryogenic pumping device includes a cooled pumping surface and an expander for expanding a compressed gas and thereby cooling the pumping surface. The vacuum pumping apparatus further includes a sensor for sensing an operating parameter, such as temperature, of the cryogenic pumping device and a controller responsive to the sensor for controlling the operating speed of the expander to produce a desired value of the operating parameter. Typically, the sensor is a temperature sensor, and the controller controls the speed of the expander motor.

REFERENCES:
patent: 3585807 (1971-06-01), Hengevoss et al.
patent: 4285710 (1981-08-01), Welch
patent: 4531372 (1985-07-01), Slabaugh
patent: 4611467 (1986-09-01), Peterson
patent: 4667477 (1987-05-01), Matsuda et al.
patent: 4679401 (1987-07-01), Lessard et al.
patent: 4757689 (1988-07-01), Bachler et al.
patent: 5001903 (1991-03-01), Lassard et al.
Edwards High Vacuum Int'l., "The Coolstar Series, Variable Speed, High Capacity Cryopumps and Microprocessor Controlled Compressors", Publ. No. 05-B526-00-895-US, 1990.

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