Cryogenic rectification system for recovery of fluorine compound

Details Cryogenic rectification system for recovery of fluorine compound Cryogenic rectification system for recovery of fluorine compound

1997-08-20

1998-06-30

Capossela, Ronald C.

Refrigeration

Cryogenic treatment of gas or gas mixture

Separation of gas mixture

62918, F25J 100

Patent

active

057717133

ABSTRACT:
A cryogenic system for the recovery of fluorine compounds from a carrier gas stream such as an effluent stream from a semiconductor facility comprising three cryogenic rectification columns and a mass transfer contacting device.

REFERENCES:
patent: 3620030 (1971-11-01), Iikubo et al.
patent: 4162272 (1979-07-01), Vautrain
patent: 5502969 (1996-04-01), Jin et al.
patent: 5626023 (1997-05-01), Fisher et al.

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