Cryogenic rectification system for fluorine compound recovery us

Details Cryogenic rectification system for fluorine compound recovery us Cryogenic rectification system for fluorine compound recovery us

1995-02-16

1997-05-06

Capossela, Ronald C.

Refrigeration

Cryogenic treatment of gas or gas mixture

Separation of gas mixture

62918, F25J 300

Patent

active

056260237

ABSTRACT:
A cryogenic system for the recovery of fluorine compounds from a carrier gas stream such as an effluent stream from a semiconductor facility comprising combining the carrier gas feed stream with additive liquid to keep fluorine compounds from solidifying and to reduce the vapor pressure of the fluorine compounds, followed by separation and recovery using a cryogenic rectification column system.

REFERENCES:
patent: 3282801 (1966-11-01), Wiist et al.
patent: 3998180 (1976-12-01), Hawkins et al.
patent: 4038332 (1977-07-01), Carter
patent: 4081574 (1978-03-01), Hawkins et al.
patent: 4484954 (1984-11-01), Tarancon
patent: 5201918 (1993-04-01), Vobach
patent: 5367881 (1994-11-01), Henzler

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