Cryogenic rectification system for fluorine compound recovery

Details Cryogenic rectification system for fluorine compound recovery Cryogenic rectification system for fluorine compound recovery

1995-02-16

1996-04-02

Kilner, Christopher

Refrigeration

Processes

Circulating external gas

62 20, 62 28, F25J 300

Patent

active

055029698

ABSTRACT:
A cryogenic system for the recovery of fluorine compounds from a carrier gas stream such as an effluent stream from a semiconductor facility comprising a mass transfer contacting device, such as a cryogenic wash column, integrated with a cryogenic rectification column system.

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