Cryogenic pump having maximum aperture throttled part

Details Cryogenic pump having maximum aperture throttled part Cryogenic pump having maximum aperture throttled part

1983-07-15

1985-07-30

Capossela, Ronald C.

Refrigeration

Low pressure cold trap process and apparatus

55269, 62268, 137601, 415160, 417901, B01D 800

Patent

active

045313725

ABSTRACT:
A low-temperature pump having a throttling valve formed by tilting radially disposed vanes in side-by-side relation, capable of fully opening a pump port to a process chamber. Motion from one vane can be coupled to the next through shims which support the vanes and form a seal when the vanes are flat in a common plane. One of the vanes may be controlled independently of the others so that coarse and fine modes of operation may be achieved by separately controlling (N-1) vanes and the Nth vane. The vanes are maintained in thermal contact with a chilled outer wall surface of a first pumping stage of a two-stage pump, the second stage coaxially surrounding a first stage maintained at a very low temperature. A central hub, at the convergence region for the vanes, supports a shield, protecting the second stage from radiation through a port in the upper regions of the pump.

REFERENCES:
patent: 4187879 (1980-02-01), Fermer et al.
patent: 4198829 (1980-04-01), Carle
patent: 4285710 (1981-08-01), Welch
patent: 4393896 (1983-07-01), Slabaugh

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