Cryogenic high pressure sensor module

Details Cryogenic high pressure sensor module Cryogenic high pressure sensor module

1997-12-18

1999-09-21

Oen, William

Measuring and testing

Fluid pressure gauge

Mounting and connection

G01L 700

Patent

active

059556781

ABSTRACT:
A pressure sensor is provided for cryogenic, high pressure applications. A highly doped silicon piezoresistive pressure sensor is bonded to a silicon substrate in an absolute pressure sensing configuration. The absolute pressure sensor is bonded to an aluminum nitride substrate. Aluminum nitride has appropriate coefficient of thermal expansion for use with highly doped silicon at cryogenic temperatures. A group of sensors, either two sensors on two substrates or four sensors on a single substrate are packaged in a pressure vessel.

REFERENCES:
patent: 5165289 (1992-11-01), Tilmans

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