Refrigeration – Storage of solidified or liquified gas – With sorbing or mixing
Patent
1978-09-18
1981-08-25
Yudkoff, Norman
Refrigeration
Storage of solidified or liquified gas
With sorbing or mixing
62 12, 55 82, F25J 102
Patent
active
042857104
ABSTRACT:
In an apparatus for removing a selected first gas from a chamber at a controllably variable pumping speed while maintaining a substantially constant pumping speed for removing a second gas from the same chamber, a flow restricting device is disposed between the chamber and a device that pumps the first gas. The flow restricting device comprises a stationary member having an apertured portion through which the first gas can flow from the chamber to the pumping device. Restriction of the flow of the first gas to the pumping device is accomplished by covering the apertured portion of the stationary member with a movable member to the extent necessary to provide the desired pumping speed for the first gas. The stationary member is maintained at a cryogenic temperature higher than the condensation temperature of the first gas, but at a value at which the second gas condenses. In one embodiment, the stationary member is maintained at the desired cryogenic temperature by being mounted in intimate thermal contact with a cryogenic fluid reservoir. In an alternative embodiment, the stationary member is mounted in intimate thermal contact with the warmer stage of a two-stage cryogenic pump.
REFERENCES:
patent: 3192730 (1965-07-01), Webb
patent: 3194054 (1965-07-01), Deaton et al
patent: 3250079 (1966-05-01), Davis et al.
patent: 3517521 (1970-06-01), Emerson
patent: 3792591 (1974-02-01), Collins
patent: 4065277 (1977-12-01), Dahlem
Variflow Automatic Gas Flow Control System, Varian Palo Alto Vacuum Division, Instruction Manual, May 1977, all pages.
Cole Stanley Z.
Herbert Leon F.
Varian Associates Inc.
Yudkoff Norman
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