Cryogenic atomic force microscope

Measuring and testing – Surface and cutting edge testing – Roughness

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Details

250306, 250307, G01B 528, G01N 2300, H01J 37252

Patent

active

054109108

ABSTRACT:
An atomic force microscope system is enclosed in a crogenic liquid dewar and operated at about ambient pressure or slightly above ambient pressure. Vaporization of the cryogenic liquid is used for cooling of the atomic force microscope system. Nitrogen, as well as other cryogenic liquids can be used, as for example helium, fluorinated hydrocarbons, isopentane, and liquid propane. Bubbling of the liquid nitrogen, which can produce excessive vibration and prevent atomic resolution for very low temperature experiments, is overcome through the pressurizing of the dewar to several psi.

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