Crucible support heater for the control of melt flow pattern in

Details Crucible support heater for the control of melt flow pattern in Crucible support heater for the control of melt flow pattern in

1993-06-21

1994-11-01

Breneman, R. Bruce

Single-crystal, oriented-crystal, and epitaxy growth processes;

Apparatus

For crystallization from liquid or supercritical state

B01D 904

Patent

active

053605993

ABSTRACT:
The present invention relates to a crucible support heater for the control of a melt flow pattern within a crucible, and more specifically to controlling a temperature gradient or distribution during crystal growth by the Czochralski method through the use of a heater located in the crucible lift rod.

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