Crucible for multi-bath liquid phase epitaxy

Details Crucible for multi-bath liquid phase epitaxy Crucible for multi-bath liquid phase epitaxy

1987-03-19

1988-10-25

McIntosh, John P.

Coating apparatus

Immersion or work-confined pool type

Work-confined pool

118415, 118421, 118422, H01L 21208

Patent

active

047795611

ABSTRACT:
The crucible is of the type in which substrates to be epitaxially coated are disposed in a slide comprising a substrate carrier (7), whose displacement permits of bringing the substrates (9) successively into contact with different baths of epitaxy. It comprises a compartment (2), in which tightening slides (11) and solution-containing slides (12) are alternately stacked, each of the latter slides having a cavity receiving a solution (14) and merging at the lower part of the said slide (12). The tightening slides (11) close the lower part of the cavities (45). The slide comprising a substrate carrier (7) can be translated between a rear position in which it is disengaged from the stack and a front position in which, after having driven out the lower slide of the stack, it is situated under this stack.

REFERENCES:
patent: 4160682 (1979-07-01), Esseluhn

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