Crucible for evaporation of metallic film

Details Crucible for evaporation of metallic film Crucible for evaporation of metallic film

1987-09-23

1988-12-13

Leung, Philip H.

Electric heating

Metal heating

Of cylinders

219 1067, 118726, 118620, 373156, H05B 624

Patent

active

047912618

ABSTRACT:
An evaporation source for RF heated evaporators in which the crucible has a susceptor made of a solid block of graphite carbon having a volume commensurate with the volume of molten material prior to evaporation. Moreover, the crucible has a depth that is less than twice its diameter. These features enhance the self-fractionation of the molten material prior to evaporation to thus enhance the properties of the film as-deposited.

REFERENCES:
patent: 2643201 (1953-06-01), Chadsay, Jr. et al.
patent: 3036888 (1962-05-01), Lowe
patent: 3227431 (1966-01-01), Steeves
patent: 3470304 (1969-09-01), Geringer
patent: 3551115 (1970-12-01), Jameison et al.
patent: 3593775 (1971-07-01), Privott, Jr. et al.
patent: 4242553 (1980-12-01), Berkman et al.

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