Crucible cover for coating installation with an electron beam so

Details Crucible cover for coating installation with an electron beam so Crucible cover for coating installation with an electron beam so

1990-01-16

1990-07-31

Bueker, Richard

Coating apparatus

Gas or vapor deposition

Crucible or evaporator structure

21912115, C23C 1400

Patent

active

049442457

ABSTRACT:
A hood type cover (4) with lifting mechanism is engaged over a crucible (1) with several material pockets (2, 3). By means of the lifting mechanism, the distance between a surface (5) of the crucible and a seal (8) on the cover (4) is varied. The lifting mechanism comprises a track (12) disposed on the wall (16) of the crucible (1). Engaged in this track are guided elements which are connected to the cover and are forcibly guided and moved upon rotary movements of the crucible (1). These guiding elements bring about a pivoting of the cover (4) or a displacement of the cover (4) or of the crucible (1) parallel to the central axis (17) of the crucible (1). This arrangement of the cover (4) permits a safe positioning of the material pockets (2, 3) inside the vacuum chamber of a coating installation.

REFERENCES:
patent: 4516525 (1985-05-01), Bourgeois
patent: 4632059 (1986-12-01), Flatscher
patent: 4724796 (1988-02-01), Ranke

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