Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus characterized by composition or treatment thereof
Patent
1998-02-03
1999-06-22
Utech, Benjamin
Single-crystal, oriented-crystal, and epitaxy growth processes;
Apparatus characterized by composition or treatment thereof
117932, 117 31, 117213, 117943, C30B 1300
Patent
active
059139757
ABSTRACT:
A quartz crucible for use in the preparation of silicon crystals substantially free from crystal void defects and a process for its preparation are disclosed. The crucible is prepared by introducing quartz powder into a rotating mould in an atmosphere containing less than about 0.5% insoluble gases such as argon. The quartz powder accumulates along the inner surface of the mould, and is subsequently heated to fuse the quartz powder to produce the crucible. The gases contained in the bubbles in the resulting crucible are comprised of less than about 0.5% insoluble gases.
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Chen Kin-Chan
MEMC Electronic Materials , Inc.
Utech Benjamin
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