Crosslinkable graft polymer non-preferentially wetted by...

Details Crosslinkable graft polymer non-preferentially wetted by... Crosslinkable graft polymer non-preferentially wetted by...

2007-06-19

2011-12-20

Wu, David W (Department: 1796)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Mixing of two or more solid polymers; mixing of solid...

C525S108000, C525S404000, C528S393000, C528S421000

Reexamination Certificate

active

08080615

ABSTRACT:
Methods for fabricating a random graft PS-r-PEO copolymer and its use as a neutral wetting layer in the fabrication of sublithographic, nanoscale arrays of elements including openings and linear microchannels utilizing self-assembling block copolymers, and films and devices formed from these methods are provided. In some embodiments, the films can be used as a template or mask to etch openings in an underlying material layer.

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