Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Processes of preparing a desired or intentional composition...
Reexamination Certificate
2002-12-13
2009-02-24
Mulcahy, Peter D. (Department: 1796)
Synthetic resins or natural rubbers -- part of the class 520 ser
Synthetic resins
Processes of preparing a desired or intentional composition...
C524S401000, C524S500000, C524S544000, C524S860000
Reexamination Certificate
active
07495046
ABSTRACT:
The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NF3plasma treatment and O3treatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m2/g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NF3plasma irradiation is at most 0.20%.
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Japanese Office Action dated Jul. 22, 2008.
Higashino Katsuhiko
Nishibayashi Hirofumi
Noguchi Tsuyoshi
Tanaka Hiroyuki
Yamato Takafumi
Daikin Industries Ltd.
Hu Henry
Mulcahy Peter D.
Sughrue & Mion, PLLC
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