Coating apparatus – Immersion or work-confined pool type – Work-confined pool
Patent
1996-07-16
1998-06-02
Edwards, Laura
Coating apparatus
Immersion or work-confined pool type
Work-confined pool
118428, 118500, 118503, B05C 300
Patent
active
057592730
ABSTRACT:
An apparatus and method is disclosed for contacting samples with liquids. The apparatus includes a slotted support member positionable with respect to a container to allow a sample retained within the slot to be contacted by chemicals within the container. The slot in the support member is defined by opposing faces that are outwardly biasable and extend from a base. Preferably, three support members are spaced parallel to each other. The slots in the three support members are preferably aligned in parallel planes to allow larger wafer samples to be retained within the slots on more than one support member. A handle is preferably attached perpendicular to and bisecting each support member. Two bending rods are preferably disposed on opposite sides of the handle perpendicular to the support members. The bending bars are positioned to allow the support members to bent over the bars thereby outwardly biasing the opposing faces and opening the slots to receive the samples.
REFERENCES:
patent: 4199613 (1980-04-01), Johnson
patent: 4960224 (1990-10-01), Boenisch
patent: 5131546 (1992-07-01), Kodera
Edwards Laura
Micro)n Technology, Inc.
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