Coating apparatus – Work holders – or handling devices
Patent
1998-05-29
1999-05-25
Edwards, Laura
Coating apparatus
Work holders, or handling devices
118407, 118428, 118503, B05C 1300
Patent
active
059066814
ABSTRACT:
An apparatus for retaining at least one semiconductor wafer sample in a desired orientation. The apparatus includes at least one support member that contains at least one slot constructed to grip at least a portion of at least one semiconductor wafer sample therein in a desired orientation. In addition, a handle may be attached to the support members for facilitating manipulation and/or support thereof. Bending bars may also be attached to support members to facilitate application of a bending force to the support members to cause the slots therein to open. When in an open position, each slot can receive at least a portion of a corresponding semiconductor wafer sample therein or release a corresponding semiconductor wafer sample therefrom.
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patent: 5131546 (1992-07-01), Kodera
patent: 5759273 (1998-06-01), Martini
Edwards Laura
Micro)n Technology, Inc.
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