Coating processes – With post-treatment of coating or coating material – Liquid extraction of coating constituent or cleaning coating
Patent
1998-05-29
2000-10-31
Lusignan, Michael
Coating processes
With post-treatment of coating or coating material
Liquid extraction of coating constituent or cleaning coating
427354, 427401, 4274301, 438 14, B05D 118, B05D 300
Patent
active
061399159
ABSTRACT:
A method for contacting at least one semiconductor wafer with a chemical solution. The method includes providing a support member constructed to support at least one semiconductor wafer in a desired orientation. The method further includes orienting the support member relative to a container holding a chemical solution such that at least a portion of each semiconductor wafer that is supported by the support member is contacted by the chemical solution within the container.
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Lusignan Michael
Micro)n Technology, Inc.
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