Cleaning and liquid contact with solids – Processes – Work handled in bulk or groups
Patent
1998-06-30
2000-05-16
Stinson, Frankie L.
Cleaning and liquid contact with solids
Processes
Work handled in bulk or groups
134157, 134148, 134 30, B08B 920
Patent
active
060622393
ABSTRACT:
A centrifugal processor for processing flat media, such as silicon wafers, has a rotor rotatably mounted within a rotor housing. Fan blades on the rotor blow air over the wafers, to move any remaining fluid droplets away from the wafer centers, to allow centrifugal force to fling the fluid droplets off of the wafers. The centrifugal processor uses clean room air, rather than nitrogen, for drying. Operating costs are reduced while manufacturing yields are increased, as spotting at the wafer centers is avoided.
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Semitool Inc.
Stinson Frankie L.
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