Critical dimension measurement structure

Details Critical dimension measurement structure Critical dimension measurement structure

1983-12-28

1986-01-28

Smith, Robert I.

Geometrical instruments

Miscellaneous

Light direction

33547, 33533, G01B 500

Patent

active

045661928

ABSTRACT:
A pattern for determining dimensions of projected or printed figures is provided having individual scaling figures therein on a mask or template. Dimensional measurement may be indicated by alignment of opposing edges of scaling figures offset from each other along the corresponding axis of alignment. Reference marks may be provided on the pattern and associated with each possible axis of alignment for indicating an absolute dimension of a concurrently projected or printed figure. To conserve space, the pattern may be "densepacked" with scaling figures such that each scaling figure includes a plurality of opposing edges, each alignable along a different axis in response to different levels of dimensional distortion.

REFERENCES:
patent: 830282 (1906-09-01), Andrews
patent: 3861798 (1975-01-01), Kobayashi et al.
patent: 4050821 (1977-09-01), Cuthbert et al.
patent: 4183659 (1980-01-01), Brunner
patent: 4288157 (1981-09-01), Brunner
patent: 4309813 (1982-01-01), Hull
patent: 4475288 (1984-10-01), Pellegrom

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