Creating an optically tunable anti-reflective coating

Details Creating an optically tunable anti-reflective coating Creating an optically tunable anti-reflective coating

2007-11-27

2007-11-27

Young, Christopher G. (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Including control feature responsive to a test or measurement

C430S311000, C430S313000, C430S315000, C430S322000, C430S325000, C430S510000

Reexamination Certificate

active

11535429

ABSTRACT:
The present invention provides methods and system for improving the accuracy of measurements made using optical metrology. The present invention relates to methods and systems for changing the optical properties of tunable resists that can be used in the production of electronic devices such as integrated circuits. Further, the invention provides methods and systems for using a modifiable resist layer that provides a first set of optical properties before exposure and a second set of optical properties after exposure.

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