Crack-resistant thermal bend actuator

Details Crack-resistant thermal bend actuator Crack-resistant thermal bend actuator

2009-08-25

2011-12-20

Feggins, Kristal (Department: 2861)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

Reexamination Certificate

active

08079668

ABSTRACT:
A thermal bend actuator comprises an active beam for connection to drive circuitry and a passive beam mechanically cooperating with the active beam. When a current is passed through the active beam, the active beam expands relative to the passive beam resulting in bending of the actuator. The passive beam comprises a first layer comprised of silicon nitride and a second layer comprised of silicon dioxide. The second layer is sandwiched between the first layer and the active beam to provide thermal insulation for the first layer.

REFERENCES:
patent: 7901046 (2011-03-01), McAvoy et al.
patent: 7963634 (2011-06-01), Yokouchi
patent: 2007/0146436 (2007-06-01), Cornell et al.
patent: 2008/0043066 (2008-02-01), Silverbrook
patent: 2008/0129783 (2008-06-01), McAvoy et al.
patent: 2008/0129795 (2008-06-01), Mcavoy et al.
patent: WO 99/03681 (1999-01-01), None

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