Crack resistant sol-gel wafer coatings for integrated optics

Details Crack resistant sol-gel wafer coatings for integrated optics Crack resistant sol-gel wafer coatings for integrated optics

2005-04-05

2005-04-05

Jolley, Kirsten (Department: 1762)

Coating processes

Centrifugal force utilized

C427S336000, C427S379000, C427S387000, C427S389700, C427S397700, C427S407100, C427S407200, C427S419200, C427S419700, C427S425000, C118S052000, C118S320000

Reexamination Certificate

active

06875467

ABSTRACT:
A method of preparing a multi-layer, crack resistant sol-gel glass derived coating on a substrate by removing the outer periphery of each layer before curing the layer and depositing any succeeding layer.

REFERENCES:
patent: 5424102 (1995-06-01), Mizukuki et al.
patent: 5476717 (1995-12-01), Floch
patent: 6248168 (2001-06-01), Takeshita et al.
patent: 6309728 (2001-10-01), Usami et al.

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