Crack detection by vapor condensation

Measuring and testing – Gas content of a liquid or a solid – By vibration

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Details

73104, G01N 2572, G01N 3102, G01N 2188

Patent

active

043144748

ABSTRACT:
A novel method for nondestructively indicating the existence of micron-sized cracks, fissures, and other such faults on the surfaces of integrated circuit semiconductor packages and other test surfaces. An indicating layer of substantially uniform thickness is formed over the entire test surface by directing an inert fluorocarbon vapor into contact with the test surface. The temperature of the test surface is below the dew point of the inert vapor so that the indicating layer forms by condensation. The existence of cracks, fissures, and other such faults is clearly indicated to the unaided eye in a dull outline conforming to the shape of the fault as a result of the differential reflection of incident light off of the indicating condensate-layer. Faulted regions absorb comparatively more light than unfaulted regions.

REFERENCES:
patent: 3580066 (1971-05-01), Pliskin et al.
patent: 4215562 (1980-08-01), Gavrilin et al.
"Symposium on Nondestructive Tests in the Field of Nuclear Energy", Apr. 7, Chicago, Ill., Article by McLain.

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