Coversion apparatus and imaging system

Details Coversion apparatus and imaging system Coversion apparatus and imaging system

2007-05-18

2009-06-23

Porta, David P (Department: 2884)

Radiant energy

Invisible radiant energy responsive electric signalling

Semiconductor system

C250S370090, C250S370110, C250S370140, C257S059000, C257S431000, C257S443000, C257S448000

Reexamination Certificate

active

07550731

ABSTRACT:
A conversion apparatus includes a pixel region, on a substrate, including a plurality of pixels arranged in a matrix, with each pixel having a conversion element that converts radiation into electric charges, and a switching element. The switching element has a structure having a gate electrode, a first insulating layer, a second insulating layer, and a semiconductor layer from the substrate side in this order. The conversion element has an MIS-type structure of a bottom electrode arranged on an insulating layer extending from the first insulating layer of the switching element and being vertically higher than the gate electrode of the switching element, an insulating layer which is formed of the same layer as the second insulating layer of the switching element, and a semiconductor layer which is formed of the same layer as the semiconductor layer of the switching element from the substrate side in this order.

REFERENCES:
patent: 5917199 (1999-06-01), Byun et al.
patent: 6847039 (2005-01-01), Mochizuki
patent: 7259037 (2007-08-01), Shih
patent: 2004/0065840 (2004-04-01), Morishita
patent: 2006/0071251 (2006-04-01), Watanabe et al.
patent: 2002-343952 (2002-11-01), None

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