Covered microchannels and the microfabrication thereof

Details Covered microchannels and the microfabrication thereof Covered microchannels and the microfabrication thereof

1996-02-02

1998-07-21

Baxter, Janet C.

Chemistry: analytical and immunological testing

Miscellaneous

436161, 422 89, 422 70, 430312, G01N 3300, G01N 3002, G03C 500

Patent

active

057834520

ABSTRACT:
The present invention is a covered microchannel comprising: a) a substrate; b) an etched material adhered to the substrate; and c) a silicon-carbon material adhered to the etched material in such a manner to form a covered microchannel; wherein the silicon-carbon material comprises SiO.sub.1.8-2.4 C.sub.0.3-1.0 and H.sub.0.7-4.0 containing at least one of the following functional groups:

REFERENCES:
patent: 3615913 (1971-10-01), Shaw
patent: 3895429 (1975-07-01), Huang et al.
patent: 5116495 (1992-05-01), Prohaska
patent: 5128737 (1992-07-01), Van Der Have
patent: 5205902 (1993-04-01), Horton et al.
patent: 5298587 (1994-03-01), Hu et al.
patent: 5320875 (1994-06-01), Hu et al.
patent: 5575929 (1996-11-01), Yu et al.
Manz et al., Journal of Chromatography, vol. 593, pp. 253-258 (1992).
Wilson, C. Grant, Intro. to Microlithography, 2nd Ed., pp. 139-267 (1994).

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